Usage of XPS depth tools for Jupyter NotebookΒΆ

[1]:

import subprocess
subprocess.run(["MPExport.exe", "-ExportProfile", "-Filename:..\source\XPS_PHI_QUANTERA_depth_1.pro"])

[1]:

CompletedProcess(args=['MPExport.exe', '-ExportProfile', '-Filename:..\\source\\XPS_PHI_QUANTERA_depth_1.pro'], returncode=0)

[2]:

%run -i txt2csv_depth.py "XPS_PHI_QUANTERA_depth_1.txt"

DEPTHPRO


[3]:

%run -i csv2graph_depth.py "XPS_PHI_QUANTERA_depth_1.csv" --jupytermode
_images/xps_depth_doc_3_0.png
_images/xps_depth_doc_3_1.png 
[4]:

%run -i txt2raw_XPS_depth.py "XPS_PHI_QUANTERA_depth_1.txt" xps_raw_depth_template.xml raw.xml --stdout

<?xml version="1.0" ?>
<metadata>
        <meta key="Platform" type="String">PC</meta>
        <meta key="Technique" type="String">XPS</meta>
        <meta key="FileType" type="String">DEPTHPRO</meta>
        <meta key="FileDesc" type="String">MIDATA001</meta>
        <meta key="SoftwareVersion" type="String">SS 3.6.1.16</meta>
        <meta key="InstrumentModel" type="String">PHI Quantera SXM</meta>
        <meta key="AcqFilename" type="String">C:\Datafiles\Butsuzai\XPS_PHI_QUANTERA_depth_1.pro</meta>
        <meta key="FileDate" type="String">2017 6 7</meta>
        <meta key="AcqFileDate" type="String">2017 6 7</meta>
        <meta key="Institution" type="String"></meta>
        <meta key="Operator" type="String"></meta>
        <meta key="ExperimentID" type="String">20170606</meta>
        <meta key="AnalyserWorkFcn" type="String">4.250 eV</meta>
        <meta key="PlatenID" type="String">MIDATA001</meta>
        <meta key="PlatenDesc" type="String"></meta>
        <meta key="PhotoFilename" type="String">MIDATA001.101.pho</meta>
        <meta key="SXIFilename" type="String"></meta>
        <meta key="SourceAnalyserAngle" type="String">45.0 d</meta>
        <meta key="AnalyserSolidAngle" type="String">0.38 sr</meta>
        <meta key="SputterIon" type="String">Ar+</meta>
        <meta key="SputterCurrent" type="String">0.000 uA</meta>
        <meta key="SputterEnergy" type="String">1.000 kV</meta>
        <meta key="FloatVolt" type="String">0.0 V</meta>
        <meta key="SputterRaster" type="String">2.00 2.00 mm</meta>
        <meta key="AnalyserMode" type="String">FAT</meta>
        <meta key="NoDPDataCyc" type="String">25</meta>
        <meta key="NoPreSputterCyc" type="String">1</meta>
        <meta key="ProfSputterDelay" type="String">5.0</meta>
        <meta key="ProfXrayOffDuringSputter" type="String">no</meta>
        <meta key="ProfSourceBlankDuringSputter" type="String">no</meta>
        <meta key="ProfZalarHighAccuracyInterval" type="String">20</meta>
        <meta key="SampleRotation" type="String">off</meta>
        <meta key="SputterMode" type="String">Alternating</meta>
        <meta key="NoDepthReg" type="String">3</meta>
        <meta column="1" key="DepthCalDef" type="String">1 Layer1 1 0.0000 0.0000 Ar+ 6.00 1.00 6 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta column="3" key="DepthCalDef" type="String">2 Layer2 7 0.0000 0.0000 Ar+ 6.00 0.50 12 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta column="5" key="DepthCalDef" type="String">3 Layer3 19 0.0000 0.0000 Ar+ 6.00 1.00 6 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta key="NoSpectralReg" type="String">2</meta>
        <meta column="1" key="SpectralRegDef" type="String">1 1 O1s 8 201 -0.1000 543.0000 523.0000 542.0000 524.0000 0.240000 112.00 AREA</meta>
        <meta column="1" key="SpectralRegDef2" type="String">1 20.0 3 0 4 1</meta>
        <meta column="2" key="SpectralRegDef" type="String">2 1 Si2p 14 201 -0.1000 112.0000 92.0000 111.0000 93.0000 0.640000 112.00 AREA</meta>
        <meta column="2" key="SpectralRegDef2" type="String">2 20.0 8 0 4 1</meta>
        <meta key="NoSpatialArea" type="String">1</meta>
        <meta key="SpatialAreaDef" type="String">1 Point7 1 (-23673.4 8299.0 23281.0 45.0 0.0)</meta>
        <meta key="SpatialAreaDesc" type="String">1 #7 SiO2 25nm</meta>
        <meta key="XraySource" type="String">Al 1486.6 mono</meta>
        <meta key="XrayPower" type="String">24.94 W</meta>
        <meta key="XrayBeamDiameter" type="String">100.0 um</meta>
        <meta key="XRayHighPower" type="String">no</meta>
        <meta key="NeutralizerCurrent" type="String">20.0 uA</meta>
        <meta key="NeutralizerEnergy" type="String">1.40 V</meta>
        <meta key="StagePosition" type="String">-23.9293 -6.9335 23.2812 45.0000 0.0044</meta>
        <meta key="ImageSizeXY" type="String">100.0000 100.0000 Spot</meta>
        <meta column="2" key="DepthCalDef" type="String">1 Layer1 1 0.0000 0.0000 Ar+ 6.00 1.00 6 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta column="4" key="DepthCalDef" type="String">2 Layer2 7 0.0000 0.0000 Ar+ 6.00 0.50 12 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta column="6" key="DepthCalDef" type="String">3 Layer3 19 0.0000 0.0000 Ar+ 6.00 1.00 6 '1KV2x2' 1.000 150 25.00 0 0 719 765 39 2.0 2.0 0.79 -0.87 0.00 0.00 Ar</meta>
        <meta column="3" key="SpectralRegDef" type="String">1 1 O1s 8 201 -0.1000 543.0000 523.0000 542.0000 524.0000 0.240000 112.00 AREA</meta>
        <meta column="5" key="SpectralRegDef" type="String">1 1 O1s 8 201 -0.1000 543.0000 523.0000 542.0000 524.0000 0.240000 112.00 AREA</meta>
        <meta column="3" key="SpectralRegDef2" type="String">1 20.0 3 0 4 1</meta>
        <meta column="5" key="SpectralRegDef2" type="String">1 20.0 3 0 4 1</meta>
        <meta column="4" key="SpectralRegDef" type="String">2 1 Si2p 14 201 -0.1000 112.0000 92.0000 111.0000 93.0000 0.640000 112.00 AREA</meta>
        <meta column="6" key="SpectralRegDef" type="String">2 1 Si2p 14 201 -0.1000 112.0000 92.0000 111.0000 93.0000 0.640000 112.00 AREA</meta>
        <meta column="4" key="SpectralRegDef2" type="String">2 20.0 8 0 4 1</meta>
        <meta column="6" key="SpectralRegDef2" type="String">2 20.0 8 0 4 1</meta>
        <column_num>6</column_num>
        <column_name>condition</column_name>
</metadata>


[5]:

%run -i raw2primary_XPS_depth.py raw.xml xps_primary_depth_template.xml primary.xml --stdout

<?xml version="1.0" ?>
<metadata>
        <meta key="Technique" type="String">XPS</meta>
        <meta key="Instrument_model_identifier" type="String">PHI Quantera SXM</meta>
        <meta key="Experiment_Identifier" type="Numeric">20170606</meta>
        <meta key="Experiment_mode" type="String">DEPTHPRO</meta>
        <meta key="Year" type="Numeric">2017</meta>
        <meta key="Month" type="Numeric">06</meta>
        <meta key="Day" type="Numeric">07</meta>
        <meta key="Analysis_source_beam_diameter" type="Quantity" unit="um">100.0</meta>
        <meta key="Analysis_source_strength" type="String">24.94W</meta>
        <meta key="Analyser_mode" type="String">FAT</meta>
        <meta key="Analyser_work_function" type="Quantity" unit="eV">4.250</meta>
        <meta key="Analyser_axis_take_off_polar_angle" type="Quantity" unit="deg">45.0</meta>
        <meta key="Analyser_acceptance_solid_angle" type="Quantity" unit="sr">0.38</meta>
        <meta key="Analysis_region" type="String">Spot</meta>
        <meta key="Analysis_width_x" type="Quantity" unit="um">100.0000</meta>
        <meta key="Analysis_width_y" type="Quantity" unit="um">100.0000</meta>
        <meta key="Sputtering_Ion_Energy" type="Quantity" unit="kV">1.000</meta>
        <meta key="Sputtering_Raster_Area" type="Quantity" unit="mm">2.00x2.00</meta>
        <meta key="Specimen_Stage_Rotation_Setting_During_Sputtering" type="String">off</meta>
        <meta key="Depth_Profiling_Preset_Layer_Number" type="Numeric">3</meta>
        <meta key="Total_Cycle_Number" type="Numeric">24</meta>
        <meta key="Cycle_Control" type="String">1.00min 6cyc, 0.50min 12cyc, 1.00min 6cyc</meta>
        <meta column="1" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer1</meta>
        <meta column="3" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer2</meta>
        <meta column="5" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer3</meta>
        <meta column="2" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer1</meta>
        <meta column="4" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer2</meta>
        <meta column="6" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer3</meta>
        <meta column="1" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="3" key="Sputtering_interval_time" type="Quantity" unit="min">0.50</meta>
        <meta column="5" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="2" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="4" key="Sputtering_interval_time" type="Quantity" unit="min">0.50</meta>
        <meta column="6" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="1" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="3" key="Sputtering_cycle" type="Numeric">12</meta>
        <meta column="5" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="2" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="4" key="Sputtering_cycle" type="Numeric">12</meta>
        <meta column="6" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta key="Sputtering_to_measurement_time" type="Quantity" unit="s">5.0</meta>
        <meta column="1" key="Species_label" type="String">O</meta>
        <meta column="1" key="Transitions" type="String">1s</meta>
        <meta column="2" key="Species_label" type="String">Si</meta>
        <meta column="2" key="Transitions" type="String">2p</meta>
        <meta column="3" key="Species_label" type="String">O</meta>
        <meta column="3" key="Transitions" type="String">1s</meta>
        <meta column="5" key="Species_label" type="String">O</meta>
        <meta column="5" key="Transitions" type="String">1s</meta>
        <meta column="4" key="Species_label" type="String">Si</meta>
        <meta column="4" key="Transitions" type="String">2p</meta>
        <meta column="6" key="Species_label" type="String">Si</meta>
        <meta column="6" key="Transitions" type="String">2p</meta>
        <meta column="1" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="2" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="3" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="5" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="4" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="6" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="1" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="2" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="3" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="5" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="4" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="6" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="1" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="2" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="3" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="5" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="4" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="6" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="1" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="2" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="3" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="5" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="4" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="6" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="1" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="2" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta column="3" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="5" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="4" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta column="6" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta key="Measurement_Acquisition_Number" type="Numeric">1</meta>
        <meta column="1" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="2" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="3" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="5" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="4" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="6" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="1" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="2" key="Number_of_scans" type="Numeric">8</meta>
        <meta column="3" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="5" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="4" key="Number_of_scans" type="Numeric">8</meta>
        <meta column="6" key="Number_of_scans" type="Numeric">8</meta>
        <meta key="Comment" type="String">1 #7 SiO2 25nm</meta>
        <column_num>6</column_num>
        <column_name>condition</column_name>
</metadata>


[6]:

%run -i batch_exe_depth_XPS.py "../source/XPS_PHI_QUANTERA_depth_1.pro" --jupytermode
_images/xps_depth_doc_6_0.png
_images/xps_depth_doc_6_1.png 
<?xml version="1.0" ?>
<metadata>
        <meta key="Technique" type="String">XPS</meta>
        <meta key="Instrument_model_identifier" type="String">PHI Quantera SXM</meta>
        <meta key="Experiment_Identifier" type="Numeric">20170606</meta>
        <meta key="Experiment_mode" type="String">DEPTHPRO</meta>
        <meta key="Year" type="Numeric">2017</meta>
        <meta key="Month" type="Numeric">06</meta>
        <meta key="Day" type="Numeric">07</meta>
        <meta key="Analysis_source_beam_diameter" type="Quantity" unit="um">100.0</meta>
        <meta key="Analysis_source_strength" type="String">24.94W</meta>
        <meta key="Analyser_mode" type="String">FAT</meta>
        <meta key="Analyser_work_function" type="Quantity" unit="eV">4.250</meta>
        <meta key="Analyser_axis_take_off_polar_angle" type="Quantity" unit="deg">45.0</meta>
        <meta key="Analyser_acceptance_solid_angle" type="Quantity" unit="sr">0.38</meta>
        <meta key="Analysis_region" type="String">Spot</meta>
        <meta key="Analysis_width_x" type="Quantity" unit="um">100.0000</meta>
        <meta key="Analysis_width_y" type="Quantity" unit="um">100.0000</meta>
        <meta key="Sputtering_Ion_Energy" type="Quantity" unit="kV">1.000</meta>
        <meta key="Sputtering_Raster_Area" type="Quantity" unit="mm">2.00x2.00</meta>
        <meta key="Specimen_Stage_Rotation_Setting_During_Sputtering" type="String">off</meta>
        <meta key="Depth_Profiling_Preset_Layer_Number" type="Numeric">3</meta>
        <meta key="Total_Cycle_Number" type="Numeric">24</meta>
        <meta key="Cycle_Control" type="String">1.00min 6cyc, 0.50min 12cyc, 1.00min 6cyc</meta>
        <meta column="1" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer1</meta>
        <meta column="3" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer2</meta>
        <meta column="5" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer3</meta>
        <meta column="2" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer1</meta>
        <meta column="4" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer2</meta>
        <meta column="6" key="Software_Preset_Sputtering_Layer_Name" type="String">Layer3</meta>
        <meta column="1" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="3" key="Sputtering_interval_time" type="Quantity" unit="min">0.50</meta>
        <meta column="5" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="2" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="4" key="Sputtering_interval_time" type="Quantity" unit="min">0.50</meta>
        <meta column="6" key="Sputtering_interval_time" type="Quantity" unit="min">1.00</meta>
        <meta column="1" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="3" key="Sputtering_cycle" type="Numeric">12</meta>
        <meta column="5" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="2" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta column="4" key="Sputtering_cycle" type="Numeric">12</meta>
        <meta column="6" key="Sputtering_cycle" type="Numeric">6</meta>
        <meta key="Sputtering_to_measurement_time" type="Quantity" unit="s">5.0</meta>
        <meta column="1" key="Species_label" type="String">O</meta>
        <meta column="1" key="Transitions" type="String">1s</meta>
        <meta column="2" key="Species_label" type="String">Si</meta>
        <meta column="2" key="Transitions" type="String">2p</meta>
        <meta column="3" key="Species_label" type="String">O</meta>
        <meta column="3" key="Transitions" type="String">1s</meta>
        <meta column="5" key="Species_label" type="String">O</meta>
        <meta column="5" key="Transitions" type="String">1s</meta>
        <meta column="4" key="Species_label" type="String">Si</meta>
        <meta column="4" key="Transitions" type="String">2p</meta>
        <meta column="6" key="Species_label" type="String">Si</meta>
        <meta column="6" key="Transitions" type="String">2p</meta>
        <meta column="1" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="2" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="3" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="5" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="4" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="6" key="Analyser_Pass_energy" type="Quantity" unit="eV">112.00</meta>
        <meta column="1" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="2" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="3" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="5" key="Abscissa_start" type="Quantity" unit="eV">543.0000</meta>
        <meta column="4" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="6" key="Abscissa_start" type="Quantity" unit="eV">112.0000</meta>
        <meta column="1" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="2" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="3" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="5" key="Abscissa_end" type="Quantity" unit="eV">523.0000</meta>
        <meta column="4" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="6" key="Abscissa_end" type="Quantity" unit="eV">92.0000</meta>
        <meta column="1" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="2" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="3" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="5" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="4" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="6" key="Abscissa_increment" type="Quantity" unit="eV">-0.1000</meta>
        <meta column="1" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="2" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta column="3" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="5" key="Collection_time" type="Quantity" unit="s">0.240000</meta>
        <meta column="4" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta column="6" key="Collection_time" type="Quantity" unit="s">0.640000</meta>
        <meta key="Measurement_Acquisition_Number" type="Numeric">1</meta>
        <meta column="1" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="2" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="3" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="5" key="Peak_Sweep_Number" type="Numeric">3</meta>
        <meta column="4" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="6" key="Peak_Sweep_Number" type="Numeric">8</meta>
        <meta column="1" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="2" key="Number_of_scans" type="Numeric">8</meta>
        <meta column="3" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="5" key="Number_of_scans" type="Numeric">3</meta>
        <meta column="4" key="Number_of_scans" type="Numeric">8</meta>
        <meta column="6" key="Number_of_scans" type="Numeric">8</meta>
        <meta key="Comment" type="String">1 #7 SiO2 25nm</meta>
        <column_num>6</column_num>
        <column_name>condition</column_name>
</metadata>
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